Cut and paste this URL to share the unmodified register and value:
https://regviz.com/r/Silicon Labs/Series1/EFM32GG12B/EFM32GG12B530F512GQ64/ETM/ETMITCTRL#0x0
ETM Integration Control Register
Integration Mode Enable
https://github.com/cmsis-svd/cmsis-svd-data